42 lines
24 KiB
Plaintext
42 lines
24 KiB
Plaintext
|CF,2,1,1;|CK,1,3,1,1;|NO,1,66,0,58,imcDevices@imc DEVICES 2.9R10 (15.3.2018)@imcDev__18191215,0,;|CG,1,5,1,1,1;|CD,2, 63, 5.0000000000000001E-03,1,1,s,0,0,0, 0.0000000000000000E+00,1;|NT,1,16,1,1,1980,0,0,0.0; |CC,1,3,1,1;|CP,1,16,1,4,7,32,0,0,1,0;|CR,1,60,0, 1.0000000000000000E+00, 0.0000000000000000E+00,1,4,mbar;|Np,1,70,"ExpGuid" "{976FA4CC-A5DE-4363-BA0D-D1A68D02D363}" 0 4,"imc07" "0" 1 4;|CN,1,26,0,0,0,14,Vacuum_Booster,0,;|Cb,1, 117,1,0, 1, 1, 0, 24000, 0, 24000,1, 4.1600999999999999E+02, 1.2418051840000000E+09,;|CS,1, 24011, 1,ㄝlD)輑D踺lDk輑D葳lD蛙lDC躭D噘lD辧D 辧Dm豯Dj趌D#躭D冔lD8賚D 誰DX踠D廨lDv躭DㄞlDT踠DU謑Do誰D庅lD溳lDH輑Dl趌D;謑D髭lD 輑DK輑D曒lDJ踠D,趌D賚D嶷lD+輑D-躭D躭D贻lD<6C>lDx踠D]趌D畿lD輑D8賚D嘬lD畿lD4豯DV譴Dg躭D槽lD
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踠DU趌DB趌D醠D 趌D镔lD+躭Dd趌D周lD廨lD辧DX踠D躭D孑lDI躭D趌D召lD}辧D 辧D<E8BEA7>lD<6C>lD^躭D<輑Di躭D擒lD€躭D愞lDf輑D`躭Dw輑D2踠D躭D椯lDL趌D+躭D.踠D<E8B8A0>lDk躭Dn趌D廛lD躭D仑lD辧D|躭D&輑Df辧D9踠D稗lDйlD扣lD容lD輑D⑤lD畿lD辧Dv躭D┸lD"輑D腾lD≯lD
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辧D佦lDT豯D汾lD齿lD>躭D第lD戄lD<6C>lD儋lD犡lD>躭Dg躭D［lDq輑D槽lD躭D<E8BAAD>lD赁lD4躭D踠D6躭D亿lD~輑DI躭D贲lD佫lD躭D 趌D€輑Ds輑D6躭DぺlD<6C>lD堓lD踠DD趌D螺lDz遧D畿lDx躭D嗇lD递lDl趌D屭lD⑤lD冘lD④lD"輑D 輑D<E8BC91>lD躭D梯lD\躭D囒lD}辧D!躭D-賚DH輑D\輑DG踠D<E8B8A0>lD}辧DM輑DD賚D熩lD据lD┻lD檐lD扣lD┸lD捽lD輑Dr踠D簇lD輑D演lD槽lD褴lD犥lD^躭D栜lD踠D蕾lDa踠DS辧DS輑D瘦lDK輑D咱lD周lD扣lD<6C>lD趌D纵lD6遧D螺lD辧D 輑Dz遧D辧D刿lD<6C>lD犥lD^躭D炤lD熩lDS趌D鲞lD涋lD炣lD\輑Db輑D熮lDкlD椶lD*辧Dm躭Dc躭D 輑D 遧D厕lD妻lD椵lD捃lD3輑D撦lD虞lD4躭D筌lD愞lD&辧D椵lD齿lD輑D檐lD剀lD躭DH輑DH輑D戚lDv躭D<E8BAAD>lD遧D{辧D<E8BEA7>踠D*踠D冔lD 辧D犦lDg躭Du辧DH辧D娸lDA躭D輑D辧D份lD绍lDG躭D盾lD 踠D僳lD}辧D<E8BEA7>lD~躭D<E8BAAD>lD炤lD 辧D绒lD嗈lD辧D<輑D1輑D檐lD樭lD儡lD掁lD傒lD^躭D 輑DㄝlDb輑D鬏lDK躭D幺lDㄝlD~躭D鳞lDH輑D贻lD蛰lDh輑D&輑D塑lD杠lD^躭D糅lD3辧D\躭DJ踠D曒lD壾lD份lD瘦lD&輑DV遧D 辧D斳lD嵼lD,辧D厕lD屴lDK輑D壾lD3輑D衍lDj辧D遧D冘lD 辧D惠lD輑D]辧D撦lD∞lD^輑D 輑D稗lDM躭D樮lD 辧DT躭D兽lD陛lD蜈lD8躭D 躭D碥lD炤lD 輑D 輑D4躭D 躭D辧D"輑D<E8BC91>lD佫lD<6C>lDu辧D;辧DH輑D|躭D1輑D萝lD踯lD份lD冔lD蜜lD*辧Dk躭D9踠D 辧D嘬lD架lD<6C>lD<6C>踠D)輑D 躭D<E8BAAD>lD撦lD踯lDw辧D惠lD1辧D
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輑DR踠DH辧Dv遧DB輑D碥lD
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輑D溰lD嵼lDl辧D<EFBFBD>lD熪lD<EFBFBD>lDB辧D€躭D<EFBFBD>lD5輑D傒lD辧D 輑D=辧Ds辧D溳lD柁lD葺lDw輑D绒lDt躭D戄lD鲛lD輑D輑D躭D5輑D瘦lD
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踠D娸lD梯lD輑D圯lD 辧D 辧D檐lD咿lD辧D堓lD<6C>lD┸lD)輑D曓lD垒lD<6C>lD~輑D辧D澽lD撦lD€輑D輑D躭D嵼lD 遧D嘬lD輑Dp辧D嵼lD澽lD份lD褫lD∞lD3輑D躭D<E8BAAD>lD辧D堓lD陛lDf辧D 辧D€輑D4遧D 遧D 辧D嗇lD泌lD辧D,遧D戄lD蒉lD,辧D曓lD&辧D?遧DU辧D嵼lD徂lD 輑D窟lD遧D踺lDT鄉DH辧DL辧Da辧D修lD柁lDw辧D0遧D`輑D 辧D赁lD"輑D 辧D+輑D噍lD扣lD澸lD瘦lD乌lD佫lD掃lDx踠D肄lD曓lDf輑D<E8BC91>lD惠lD堔lD<6C>lD 輑D宗lD钝lD┷lD+躭D栎lD鲛lD 辧D栜lD槽lD囒lD<躭D|輑D苘lD螺lDL遧D<輑D`輑D陛lD炣lD犦lD;辧D苒lD<6C>lD蛙lD壽lD污lD@輑D涋lD躭D躭D檑lD┷lD<6C>lDM躭Dv躭D蜣lD<6C>lD躭DJ踠D~輑D堓lDu趌D&辧D3輑D躭D
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踠D趌Ds辧D8躭Dh輑D燧lD邵lD佭lDF辧Dc躭Dt踠Db輑DнlD娸lD碹lD欄lDH輑D~躭D港lDF輑D4躭DV躭D賚D<E8B39A>lD<6C>lD庳lDr遧D(辧D)躭D<E8BAAD>lD樮lDf輑Di躭D咣lD<6C>lD嵸lDE鄉D2遧D斳lD
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辧D<EFBFBD>lD躭D<E8BAAD>踠D嵸lD広lDкlD辧D衍lDv躭D<E8BAAD>lD鲔lD嗇lD[辧D輑D<E8BC91>lD纵lD踠D苒lD+輑D>躭D辧D犦lDh輑DM輑Dw輑DㄝlD躭D戃lDk輑D蒉lD肄lD嬡lD贲lD<6C>lD輑DN趌D(踠D嗇lDq躭D刿lDj踠D篡lDm躭D儡lD┸lDg躭D4躭D溰lD壾lD<6C>lD晦lD曓lD~輑D 輑D6躭D避lD杠lD炤lD递lD<6C>lD輑Du輑D堓lD篡lD6躭DM躭D,踠D&辧D
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躭Dw趌D@輑D愞lDR躭D萝lD^輑D 輑D擒lD輑D輑D鲔lDs輑D輑Ds輑DT踠D斲lD栎lD踠D溰lD 輑D鲔lD)輑D圯lD<6C>lD屰lD捽lDйlD6躭D扣lD辧D溰lD.踠Df輑D嬡lDk躭D-躭D7輑Dm輑Dh輑D周lD盾lD娸lD┸lDF輑D<E8BC91>lDf辧D傒lDX踠Db輑Dm輑D┷lD囓lD贻lD嵻lD蛙lD 躭D螺lD4遧D蛙lD瘦lDi躭D<E8BAAD>lD剀lDs趌D`躭D輑D蛙lD3辧Dh輑D^輑D>輑D惠lD<輑D輑DㄝlD6躭D<E8BAAD>lD輑D槽lDg遧D噍lD<躭DT躭D┷lD 輑D碹lDh輑D邵lD椯lD咱lDF辧D熯lD 輑DR躭D 躭Du輑D輑Dk躭D+輑D2踠D燹lD筝lDM輑Ds輑D>躭D!遧DF輑D€輑DW輑D3辧D<E8BEA7>lD@輑DH辧DR躭D壾lD避lD胲lD[辧D<E8BEA7>lD∞lD虞lD傒lD萝lDm輑DU辧D噍lD遧D 輑DX踠D辧DL辧D稗lDh輑D筌lD5輑D8躭DP辧D<E8BEA7>lDM躭D溰lD⑤lD溰lD咱lDX豯D囓lD%鄉D傒lDp辧D<輑D螺lD堓lD污lD修lD<6C>辧D\躭D溰lDU輑D螺lD7輑DJ趌D役lD羞lD)輑D<E8BC91>lD;辧D7辧DкlDйlD\躭D躭DT躭D輑D<E8BC91>lD鬏lD厕lD褫lD镓lDㄝlDS辧D)躭D孑lD傒lD 辧D溳lD蛙lD踠D趌D嗈lD愞lD犥lD椵lD€輑D<E8BC91>lD捃lD6踠D拶lD挢lD苘lDミlD斲lD躭DT躭DS輑D 躭D寿lDm輑DS辧D咣lD"輑D踺lD绍lD~躭D 辧D堔lD萝lD庅lD\躭D炤lD辧DW輑D惠lDU辧D\輑DK輑D辧D\躭DX躭DS辧D擒lDq輑D呥lD递lD孑lD惠lD咱lD]踠D 躭D^輑D炤lDK輑D戃lD7輑D≯lD燧lD肃lD堔lD堓lD熪lDc踠D蜈lD撢lD)輑DU辧Db輑D9踠DT躭D@輑D筌lD辧D<E8BEA7>lD熪lDm躭Du輑D7輑D堓lD囓lD6踠D 輑D⑤lD犥lD^躭Dv躭D胲lD!躭DF輑DI躭D庅lD坜lDK躭Di躭D┸lD苘lD娸lD 輑D遧DL辧D辧DB輑D剀lD娹lD}辧D-躭D?踠D)輑D廛lD鬏lD<6C>lD澺lD囓lD僳lD阙lD躭D葳lD廛lD杠lD1輑D葺lD3輑D［lDS趌D贻lD梯lD<6C>lD戄lD贻lD呧lDV遧D!躭D徺lD┷lD嵻lD髭lD<6C>lDi躭D}辧D曓lD冔lD 輑D_辧D<E8BEA7>lDM躭D輑D栜lD'遧D鄉D 輑D贲lD贺lD輑D,辧Dn踠D~輑D睫lDk輑Ds輑D盾lD捽lD}辧DL遧DX躭D嬡lD辧Dk輑D€輑DF輑D-躭D 辧D愞lD}辧Ds辧DV躭D6躭D<E8BAAD>lD 辧D€輑D耻lD躭D躭Dj辧D螺lDM躭D"輑D腾lD斲lD(踠D躭DI鄉D葺lD&辧D蜜lDX踠D褴lD*辧D遧D蒂lD躭D<E8BAAD>lDM輑D徂lD踯lD碥lD檑lDJ辧DK輑D擒lD鲛lD4踠DW輑D樮lDH輑D犦lD屰lD9踠D屰lD 辧D2踠Dt躭D褴lD糙lDh輑D泌lDT踠D=辧D脎lD份lD辧D<E8BEA7>lD傒lD苘lD辧D<E8BEA7>lD嗈lD妻lD擒lD 躭D<E8BAAD>lD桔lD修lD据lD<6C>lD辧D苘lDW輑DG遧D囓lD梯lD萝lD衍lD<輑Dx踠D躭D 躭D~躭D5辧D澽lD蜊lD炤lD堔lD胲lDM輑D2躭DкlDF輑D輑D鲛lD!躭DH趌D钝lDぺlD,踠D€躭D份lD溳lD苘lD剀lD蜊lD輑D8躭D贲lD躭D熠lD_辧Du輑D!躭DU輑D冔lD1辧D&輑D嘬lD躭D賚D蜜lD噘lD広lDW輑D冘lD廛lD杠lDK輑D避lD堓lD<6C>lD躭D周lD辧D`輑D 趌D畿lD柁lD周lD}辧D份lD-輑Dv踠D唾lD]辧D栜lD<6C>lD,踠D汾lD6躭D徺lD蕾lD<躭D 趌D桔lDx躭D陛lDv踠Da踠D*辧DV踠D>躭DU辧DM輑DV踠D勝lD8躭D演lD髻lD<6C>lD斳lD泌lD壾lDi躭D嘬lD螺lD踯lD`輑D輑D蛙lD椱lD
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躭D耻lD+輑D@輑D>躭D`躭Dw輑Da辧D辧D,辧D 躭D?踠D2躭D+輑D忿lD躭DG躭D?遧D撦lD曒lD-輑D壽lD贻lD曒lD斳lD架lD┸lD)躭D糈lD儡lD辧D8躭D~輑D0遧D绍lD\輑D<E8BC91>lD輑D汾lD}趌D<E8B68C>lDL辧D周lDk輑D"辧D,遧D<E981A7>lD+輑D栎lDg躭D耻lD輑D<E8BC91>lD份lDF輑DU輑D褴lD樮lD孑lD<6C>lDX躭D)輑D7輑D柁lD<6C>lD)躭D瘦lD(辧D&辧Dl辧D娹lD坜lD 輑D港lD@輑D葺lD避lD>躭D3輑Ds輑D葺lD嵼lDh輑DW輑D绍lDp辧D撦lD+躭Dq輑D堓lD递lD 輑D架lD=辧D蛙lD 輑D娹lD+輑D輑D|輑D儡lD廛lD5輑D#踠D<E8B8A0>lD孑lD躭D 輑D遛lD樮lD 輑DV躭D5辧D杠lD犥lD褴lDйlDt遧D 躭D葳lD辧D蛰lD辧DV躭D螺lD犦lD捃lD踯lD戚lD<6C>lD躭D 躭D@輑D撦lD曒lD躭D燧lD\鄉D^輑D冘lD~輑D蜊lD┸lD阚lD3趌D剀lD€躭DH輑Dw輑Da踠D椶lD葺lDC躭D<E8BAAD>lD曒lDS輑D椵lD2躭D4躭D避lD檑lD壽lD熩lD3趌D<E8B68C>lD容lD椵lD腾lD篡lD脎lD<6C>lDW輑D
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趌D螺lDㄞlD-輑D輑D\躭D1輑D犥lDйlDкlD_辧D 輑D擒lD 輑D踯lD崔lD炤lD苒lD娸lD暹lD2躭D镔lD檑lD<6C>lD3輑D┸lD<6C>lD垒lD+躭D 輑Dh輑Dk輑D]辧D 躭D6踠D
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輑D
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