24 KiB
24 KiB
|CF,2,1,1;|CK,1,3,1,1;|NO,1,66,0,58,imcDevices@imc DEVICES 2.9R10 (15.3.2018)@imcDev__18191215,0,;|CG,1,5,1,1,1;|CD,2, 63, 5.0000000000000001E-03,1,1,s,0,0,0, 0.0000000000000000E+00,1;|NT,1,16,1,1,1980,0,0,0.0; |CC,1,3,1,1;|CP,1,16,1,4,7,32,0,0,1,0;|CR,1,60,0, 1.0000000000000000E+00, 0.0000000000000000E+00,1,4,mbar;|Np,1,70,"ExpGuid" "{976FA4CC-A5DE-4363-BA0D-D1A68D02D363}" 0 4,"imc07" "0" 1 4;|CN,1,26,0,0,0,14,Vacuum_Booster,0,;|Cb,1, 117,1,0, 1, 1, 0, 24000, 0, 24000,1, 4.1600999999999999E+02, 1.2418051840000000E+09,;|CS,1, 24011, 1,ㄝlD)輑D踺lDk輑D葳lD蛙lDC躭D噘lD<6C>D 辧Dm豯Dj趌D#躭D冔lD8賚D 誰DX踠D廨lDv躭DㄞlDT踠DU謑Do誰D庅lD溳lDH輑Dl趌D;謑D髭lD 輑DK輑D曒lDJ踠D,趌D賚D嶷lD+輑D-躭D躭D贻lD<6C>lDx踠D]趌D畿lD輑D8賚D嘬lD畿lD4豯DV譴Dg躭D槽lD
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